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CLASSICAL-TRAJECTORY CALCULATIONS ON AR+ SPUTTERING OF A SI(001) SURFACE USING AN ABINITIO POTENTIAL

被引：46
作者：
STANSFIELD, RA
BROOMFIELD, K
CLARY, DC
机构：
来源：
PHYSICAL REVIEW B | 1989年 / 39卷 / 11期
关键词：
D O I：
10.1103/PhysRevB.39.7680
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：7680 / 7696
页数：17
相关论文
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