RELIABLE SPIN-ON SOURCE FOR ACCEPTOR DIFFUSION INTO III/V-COMPOUND SEMICONDUCTORS

被引：14

作者：

FRANZ, G

AMANN, MC

机构：

来源：

关键词：

D O I：

10.1149/1.2097388

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2410 / 2413

页数：4

共 26 条

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