A MODEL FOR OXIDATION OF SILICON BY OXYGEN

被引：19

作者：

CRISTY, SS

CONDON, JB

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1981年 / 128卷 / 10期

关键词：

D O I：

10.1149/1.2127211

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2170 / 2174

页数：5

共 23 条

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