ELECTRON ACCELERATION RESONANT WITH SHEATH MOTION IN A LOW-PRESSURE RADIO-FREQUENCY DISCHARGE

被引:13
作者
OKUNO, Y
OHTSU, Y
FUJITA, H
机构
[1] Department of Electrical Engineering, Saga University, Saga 840
关键词
D O I
10.1063/1.111858
中图分类号
O59 [应用物理学];
学科分类号
摘要
A new electron acceleration method in low-pressure radio-frequency (rf) discharges, leading to high density plasmas, is proposed. Electrons are resonantly accelerated by multiple interactions with a moving rf sheath under a specific magnetic flux density which satisfies the condition that twice the electron cyclotron frequency is equal to the rf driving frequency. Experimental evidence is presented. This technique might be useful for the generation of low-pressure high density rf plasmas.
引用
收藏
页码:1623 / 1625
页数:3
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