SEQUENCE OF PHASE FORMATION IN PLANAR METAL-SI REACTION COUPLES

被引：78

作者：

TSAUR, BY ^{[1
]}

LAU, SS ^{[1
]}

MAYER, JW ^{[1
]}

NICOLET, MA ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

关键词：

D O I：

10.1063/1.92183

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：922 / 924

页数：3

共 15 条

[1] [Anonymous], 1978, HDB BINARY PHASE DIA
[2] KINETICS OF PHASE FORMATION IN AU-AL THIN-FILMS
CAMPISANO, SU
FOTI, G
RIMINI, E
LAU, SS
MAYER, JW
[J]. PHILOSOPHICAL MAGAZINE, 1975, 31 (04): : 903 - 917
[3] METAL-RICH PD-SILICIDE FORMATION IN THIN-FILM INTERACTIONS
CANALI, C
SILVESTRI, L
CELOTTI, G
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (09) : 5768 - 5772
[4] PHASE-DIAGRAMS AND METAL-RICH SILICIDE FORMATION
CANALI, C
MAJNI, G
OTTAVIANI, G
CELOTTI, G
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (01) : 255 - 258
[5] ELLIOTT RP, 1965, CONSTITUTION BINARY
[6] XPS STUDY OF THE CHEMICAL-STRUCTURE OF THE NICKEL-SILICON INTERFACE
GRUNTHANER, PJ
GRUNTHANER, FJ
MAYER, JW
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (05): : 924 - 929
[7] GRUNTHANER PJ, 1980, 7TH P ANN PCSI C
[8] Hansen M., 1965, CONSTITUTION BINARY
[9] NAVA F, UNPUBLISHED
[10] REVIEW OF BINARY ALLOY FORMATION BY THIN-FILM INTERACTIONS
OTTAVIANI, G
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05): : 1112 - 1119