ANISOTROPIC OXIDATION OF GERMANIUM

被引：16

作者：

SLADKOVA, J ^{[1
]}

机构：

[1] TECHN UNIV BRNO,FAC ELECTROTECHN,CS-61300 BRNO,CZECHOSLOVAKIA

来源：

CZECHOSLOVAK JOURNAL OF PHYSICS | 1977年 / 27卷 / 08期

关键词：

D O I：

10.1007/BF01588943

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：943 / 950

页数：8

共 13 条

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[3] SPACE CHARGE IN GROWING OXIDE FILMS [J].

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[4] OPTICAL CONSTANTS OF GERMANIUM BY ELLIPSOMETRY [J].

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VEDAM, K .

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[5] DETERMINATION OF OPTICAL CONSTANTS AND THICKNESS OF A THIN SLIGHTLY ABSORBING FILM BY ELLIPSOMETRIC MEASUREMENT [J].

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[6]

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[7] ELLIPSOMETRIC LIQUID IMMERSION METHOD FOR DETERMINATION OF ALL OPTICAL PARAMETERS OF SYSTEM - NONABSORBING FILM ON AN ABSORBING SUBSTRATE [J].

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KNAUSENB.WH ;

VEDAM, K .

SURFACE SCIENCE, 1969, 16 :112-&

[8]

MCCRACKIN FC, 1964, NBS242 TECH NOT

[9] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].

MCCRACKIN, FL ;

PASSAGLIA, E ;

STROMBERG, RR ;

STEINBERG, HL .

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[10]

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