IN-SITU ELLIPSOMETRIC DIAGNOSTICS FOR CONTROLLED GROWTH OF METAL-OXIDES WITH SURFACE CHEMICAL-REACTIONS

被引：21

作者：

KUMAGAI, H

TOYODA, K

机构：

[1] Laser Science Research Group, The Institute of Physical and Chemical Research (RIKEN), Wako, Saitama, 351-01

来源：

APPLIED SURFACE SCIENCE | 1994年 / 82-3卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(94)90262-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In situ diagnostics for controlled growth of metal oxides such as aluminum oxide with surface chemical reactions was successfully conducted with a spectroscopic ellipsometer. It was found that the self-limiting growth of aluminum oxide films at room temperature was clearly observed with alternate dosing of binary vapors of trimethylaluminum and hydrogen peroxide.

引用

页码：481 / 486

页数：6

共 16 条

[1] ATOMIC LAYER EPITAXY OF III-V BINARY COMPOUNDS
BEDAIR, SM
TISCHLER, MA
KATSUYAMA, T
ELMASRY, NA
[J]. APPLIED PHYSICS LETTERS, 1985, 47 (01) : 51 - 53
[2] Born M., 1975, PRINCIPLES OPTICS
[3] DOI A, 1986, APPL PHYS LETT, V49, P785, DOI 10.1063/1.97546
[4] FAST ROOM-TEMPERATURE GROWTH OF SIO2-FILMS BY MOLECULAR-LAYER DOSING
EHRLICH, DJ
MELNGAILIS, J
[J]. APPLIED PHYSICS LETTERS, 1991, 58 (23) : 2675 - 2677
[5] LOW-TEMPERATURE GROWTH OF THIN-FILMS OF AL2O3 BY SEQUENTIAL SURFACE CHEMICAL-REACTION OF TRIMETHYLALUMINUM AND H2O2
FAN, JF
SUGIOKA, K
TOYODA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1991, 30 (6B): : L1139 - L1141
[6] GEORGE M, 1993, MICROPROCESS 93, P132
[7] SURFACE PHOTOCHEMICAL PHENOMENA IN LASER CHEMICAL VAPOR-DEPOSITION
HIGASHI, GS
ROTHBERG, LJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (05): : 1460 - 1463
[8] SEQUENTIAL SURFACE CHEMICAL-REACTION LIMITED GROWTH OF HIGH-QUALITY AL2O3 DIELECTRICS
HIGASHI, GS
FLEMING, CG
[J]. APPLIED PHYSICS LETTERS, 1989, 55 (19) : 1963 - 1965
[9] FLOW-RATE MODULATION EPITAXY OF GAAS
KOBAYASHI, N
MAKIMOTO, T
HORIKOSHI, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1985, 24 (12): : L962 - L964
[10] COMPARATIVE-STUDY OF AL2O3 OPTICAL CRYSTALLINE THIN-FILMS GROWN BY VAPOR COMBINATIONS OF AL(CH3)3/N2O AND AL(CH3)3/H2O2
KUMAGAI, H
TOYODA, K
MATSUMOTO, M
OBARA, M
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (12B): : 6137 - 6140

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