MINORITY-CARRIER DIFFUSION-COEFFICIENTS IN HIGHLY DOPED SILICON

被引:96
作者
DZIEWIOR, J [1 ]
SILBER, D [1 ]
机构
[1] AEG FUNKEN,FORSCH INST 235,D-6000 FRANKFURT 71,FED REP GER
关键词
D O I
10.1063/1.91024
中图分类号
O59 [应用物理学];
学科分类号
摘要
Direct experimental determination of minority-carrier mobilities and corresponding diffusion coefficients in highly doped p- and n-type silicon have apparently not been performed until now. We have determined the minority-carrier diffusion coefficient in phosphorus- and boron-doped silicon (doping range 1017-1019 cm-3) at 300 K by measuring the complex diffusion length of minority carriers generated by 10.7-MHz optical excitation. Converted into mobilities by the Einstein relation, the results do not differ significantly from Irvin's majority-carrier mobilities.
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页码:170 / 172
页数:3
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