REGULAR ARTIFICIAL NANOMETER-SCALE STRUCTURES FABRICATED WITH SCANNING TUNNELING MICROSCOPE

被引：20

作者：

GU, QJ

LIU, N

ZHAO, WB

MA, ZL

XUE, ZQ

PANG, SJ

机构：

[1] Beijing Laboratory of Vacuum Physics, Chinese Academy of Sciences, Beijing 100080

来源：

APPLIED PHYSICS LETTERS | 1995年 / 66卷 / 14期

关键词：

D O I：

10.1063/1.113354

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The scanning tunneling microscope (STM) has been used to fabricate grooves a few nm wide at room temperature by extracting atoms one by one from the Si(111)7×7 surfaces. When the direction of modification is parallel to the basic vector of Si(111)7×7 surfaces, grooves formed by such a process have atomically straight edges and lateral features as small as one 7×7 unit cell wide. The critical current under various voltages for fabricating grooves is measured. The modification mechanism is discussed based on the experiment data in this letter.© 1995 American Institute of Physics.

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页码：1747 / 1749

页数：3

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