SIMPLE TECHNIQUE FOR FABRICATING LIMITED COUPLER GRATINGS BY HOLOGRAPHIC METHOD USING STANDARD THICK PHOTORESIST

被引:4
作者
PASCAL, D
OROBTCHOUK, R
LAVAL, S
KOSTER, A
机构
[1] Institut d'Electronique Fondamentale, CNRS URA 22 Bât. 220, Université Paris-Sud
关键词
HOLOGRAPHIC GRATINGS;
D O I
10.1049/el:19950623
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The fabrication of photoresist gratings is considered. A solution to the problem of 'transversal standing waves' is given and appears simple and versatile.
引用
收藏
页码:914 / 915
页数:2
相关论文
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