OBSERVATIONS OF AL2O3 AND FREE SILICON AT INTERFACE BETWEEN ALUMINUM FILMS AND SIO2

被引：26

作者：

STRAUSSER, YE

SCHEIBNER, EJ

JOHANNESSEN, JS

机构：

[1] VARIAN ASSOC,PALO ALTO,CA 94303

[2] GEORGIA INST TECHNOL,ATLANTA,GA 30332

[3] STANFORD UNIV,STANFORD,CA 94305

来源：

THIN SOLID FILMS | 1978年 / 52卷 / 02期

关键词：

D O I：

10.1016/0040-6090(78)90139-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：203 / 214

页数：12

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