共 22 条
[1]
ROLE OF METAL-SEMICONDUCTOR INTERFACE IN SILICON INTEGRATED-CIRCUIT TECHNOLOGY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1974, 11 (06)
:972-984
[2]
BERTRAM WJ, 1983, VLSI TECHNOLOGY, P605
[3]
ELECTRICAL-PROPERTIES OF PLATINUM IN SILICON
[J].
JOURNAL OF APPLIED PHYSICS,
1979, 50 (05)
:3396-3403
[6]
Gambino J. P., 1988, Polysilicon Films and Interfaces. Symposium, P181
[7]
METAL PRECIPITATES IN SILICON P-N JUNCTIONS
[J].
JOURNAL OF APPLIED PHYSICS,
1960, 31 (10)
:1821-1824
[9]
LEFFERTS RB, 1982, IEEE INT SOL STAT CI, P16
[10]
MONKOWSKI M, IN PRESS