PHYSICAL AND ELECTRICAL-PROPERTIES OF YTTRIA-STABILIZED ZIRCONIA EPITAXIAL THIN-FILMS DEPOSITED BY ION-BEAM SPUTTERING ON SILICON

被引：40

作者：

PELLET, C

SCHWEBEL, C

HESTO, P

机构：

来源：

THIN SOLID FILMS | 1989年 / 175卷

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D O I：

10.1016/0040-6090(89)90803-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：23 / 28

页数：6

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