SI ON CUBIC ZIRCONIA

被引：20

作者：

MANASEVIT, HM ^{[1
]}

GOLECKI, I ^{[1
]}

MOUDY, LA ^{[1
]}

YANG, JJ ^{[1
]}

MEE, JE ^{[1
]}

机构：

[1] ROCKWELL INT CORP,MICROELECTR RES & DEV CTR,ANAHEIM,CA 92803

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 08期

关键词：

D O I：

10.1149/1.2120076

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：1752 / 1758

页数：7

相关论文

共 35 条

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[8] REDUCTION IN CRYSTALLOGRAPHIC SURFACE-DEFECTS AND STRAIN IN 0.2-MU-M-THICK SILICON-ON-SAPPHIRE FILMS BY REPETITIVE IMPLANTATION AND SOLID-PHASE EPITAXY
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[J]. APPLIED PHYSICS LETTERS, 1983, 42 (06) : 501 - 503

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