TIP-CHIP BONDING - SOLDER BONDING TO THE SIDES OF SUBSTRATES

被引:2
作者
CHAN, WK
YIYAN, A
BHAT, R
机构
[1] Bellcore, Red Bank, NJ 07701
关键词
OPTOELECTRONICS; INTEGRATED OPTICS; PHOTODETECTORS;
D O I
10.1049/el:19921100
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A method of butt coupling a photodetector chip to the output facet of waveguides by solder bonding is described. The critical step of defining contact pads on the facet that are well aligned to the waveguides is carried out with a temporary shadow mask fabricated in situ. All of the light emerging from the waveguide is collected with little sensitivity to wavelength, polarisation and details of the device structure.
引用
收藏
页码:1730 / 1732
页数:3
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