RAMAN INVESTIGATIONS OF REACTION PROCESS IN MOVPE

被引：23

作者：

MONTEIL, Y ^{[1
]}

BERTHET, MP ^{[1
]}

FAVRE, R ^{[1
]}

HARISS, A ^{[1
]}

BOUIX, J ^{[1
]}

VAILLE, M ^{[1
]}

GIBART, P ^{[1
]}

机构：

[1] SOPHIA ANTIPOLIS,CNRS,PHYS SOLIDE & ENERGIE SOLAIRE LAB,F-06560 VALBONNE,FRANCE

来源：

JOURNAL OF CRYSTAL GROWTH | 1986年 / 77卷 / 1-3期

关键词：

D O I：

10.1016/0022-0248(86)90298-8

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：172 / 181

页数：10

共 13 条

[1] MASS SPECTROMETRIC STUDIES OF VAPOR PHASE CRYSTAL GROWTH .1. GAASXP1-X SYSTEM (0 LESS THAN OR EQUAL TO X LESS THAN OR EQUAL TO 1)
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (09) : 1473 - &
[2] GAS-FLOW PATTERNS IN HORIZONTAL EXPITAXIAL REACTOR CELLS OBSERVED BY INTERFERENCE HOLOGRAPHY
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (03) : 634 - 644
[3] ON THE EFFECT OF CARRIER GAS ON GROWTH-CONDITIONS IN MOCVD REACTORS - RAMAN-STUDY OF LOCAL TEMPERATURE
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VESTAVIK, O
PLETSCHEN, W
MIRCEA, A
HEYEN, M
RICHTER, W
[J]. JOURNAL OF CRYSTAL GROWTH, 1984, 68 (01) : 136 - 141
[4] NUMERICAL-ANALYSIS OF THE TRANSPORT PHENOMENA IN MOCVD PROCESS
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KOMIYA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (05): : 620 - 625
[5] A STUDY OF THE GROWTH-MECHANISM OF EPITAXIAL GAAS AS GROWN BY THE TECHNIQUE OF METAL ORGANIC VAPOR-PHASE EPITAXY
LEYS, MR
VEENVLIET, H
[J]. JOURNAL OF CRYSTAL GROWTH, 1981, 55 (01) : 145 - 153
[6] GROWTH OF MULTIPLE THIN-LAYER STRUCTURES IN THE GAAS-ALAS SYSTEM USING A NOVEL VPE REACTOR
LEYS, MR
VANOPDORP, C
VIEGERS, MPA
TALENVANDERMHEEN, HJ
[J]. JOURNAL OF CRYSTAL GROWTH, 1984, 68 (01) : 431 - 436
[7] ON THE REACTION-MECHANISM OF GAAS MOCVD
NISHIZAWA, J
KURABAYASHI, T
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (02) : 413 - 417
[8] EXAMINATION OF PRODUCT CATALYZED REACTION OF TRIMETHYLGALLIUM WITH PHOSPHINE AND MECHANISM OF CHEMICAL VAPOR-DEPOSITION OF GALLIUM-PHOSPHIDE AND GALLIUM-ARSENIDE
SCHLYER, DJ
RING, MA
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (04) : 569 - 573
[9] SCHLYER DJ, 1976, J ORGANOMET CHEM, V114, P9
[10] SCHLYER DJ, 1974, J ORG CHEM, V71, pV25

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