共 8 条
- [1] KUMAGAWA M, 1970, J ELECTROCHEM SOC, V117, P907
- [2] KUMAGAWA M, 1968, JPN J APPL PHYS, V7, P1322
- [5] MECHANISM OF CHEMICAL VAPOR-DEPOSITION OF SILICON [J]. JOURNAL OF CRYSTAL GROWTH, 1981, 52 (APR) : 213 - 218
- [7] NISHIZAWA J, 1980, MAY EL SOC M ST LOUI