NUMERICAL-ANALYSIS OF THE TRANSPORT PHENOMENA IN MOCVD PROCESS

被引：51

作者：

KUSUMOTO, Y

HAYASHI, T

KOMIYA, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 05期

关键词：

D O I：

10.1143/JJAP.24.620

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：620 / 625

页数：6

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