SCHOTTKY-BARRIER HEIGHTS OF W ON SI1-XGEX ALLOYS

被引:32
作者
AUBRY, V [1 ]
MEYER, F [1 ]
WARREN, P [1 ]
DUTARTRE, D [1 ]
机构
[1] FRANCE TELECOM,CNET,F-38243 MEYLAN,FRANCE
关键词
D O I
10.1063/1.110468
中图分类号
O59 [应用物理学];
学科分类号
摘要
The Schottky barrier height of W on p-type Si1-xGex/Si has been investigated as a function of composition (10% less-than-or-equal-to x less-than-or-equal-to 33%) and Si1-xGex thickness for a given composition. The barrier height decreases with increasing Ge fraction and follows the rate of strain relaxation. These results suggest that the Fermi level at the interface is pinned relative to the conduction band.
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页码:2520 / 2522
页数:3
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