MORPHOLOGY OF THICK EVAPORATED ALUMINUM FILMS AND THEIR PURITY AS DETERMINED BY PROTON-INDUCED X-RAY ANALYSIS

被引：8

作者：

DHERE, NG

ARSENIO, TP

PATNAIK, BK

机构：

[1] INST MILITAR ENGENHARIA,DEPT CIENCIAS MAT,RIO DE JANEIRO,RJ,BRAZIL

[2] PONTIFICIA UNIV CATOLICA,DEPT FIS,RIO DE JANEIRO,RJ,BRAZIL

来源：

THIN SOLID FILMS | 1977年 / 44卷 / 01期

关键词：

D O I：

10.1016/0040-6090(77)90025-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：29 / 42

页数：14

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ARSENIO, TP ;

PATNAIK, BK .

THIN SOLID FILMS, 1975, 30 (02) :267-279

[5] ANOMALOUS LARGE GRAINS IN ALLOYED ALUMINUM THIN-FILMS .2. ELECTROMIGRATION AND DIFFUSION IN THIN-FILMS WITH VERY LARGE GRAINS [J].

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DHEURLE, FM .

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[6]

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[7] DEPOSITION OF ALUMINUM FROM AN ELECTRON-BEAM SOURCE [J].

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01) :33-&

[8]

HEURLE FM, 1968, T METALL SOC AIME, V242, P502

[9]

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[10]

HOLLAND L, 1974, VACUUM MANUAL, P74

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