THE INFLUENCE OF NITROGEN AND OTHER GASES ON THE MAGNETIC-PROPERTIES OF BIAS-SPUTTERED CO-CR PERPENDICULAR FILMS FOR COMPUTER MEMORY APPLICATIONS

被引：7

作者：

MAPPS, DJ

MAHVAN, N

AKHTER, MA

机构：

[1] Plymouth Polytechnic, Engl, Plymouth Polytechnic, Engl

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1987年 / 23卷 / 05期

关键词：

COBALT CHROMIUM ALLOYS - Magnetic Properties - DATA STORAGE; MAGNETIC; -; NITROGEN; Applications; SPUTTERING;

D O I：

10.1109/TMAG.1987.1065356

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper investigates the effect of negative bias on sputtered CoCr layers for hard-disc memory applications. Negative bias can significantly improve the C-axis orientation and the perpendicular magnetic properties. Oxygen and nitrogen in particular degrade the desired properties but hydrogen can have a beneficial effect at low concentrations.

引用

页码：2473 / 2475

页数：3

共 7 条

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COUGHLIN, TM
JUDY, JH
WUORI, ER
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[3] EFFECTS OF IMPURITY GASES ON PROPERTIES OF CO-CR PERPENDICULAR RECORDING MEDIA IN HIGH-RATE AND CONTINUOUS SPUTTERING PROCESS
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OUCHI, K
SAIKI, K
KIMURA, M
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[5] COMPARISON OF THE EFFECTS OF OXYGEN ON COBALT AND COBALT CHROMIUM THIN-FILMS
THOMPSON, JA
STEVENSON, DA
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) : 1441 - 1443
[6] HIGH-RATE THICK-FILM GROWTH
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[7] YAMASHITA N, 1985, IEEE TRANSLATION J M, V1

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