CATHODIC DEPOSITION OF AMORPHOUS-ALLOYS OF SILICON, CARBON, AND FLUORINE

被引：32

作者：

LEE, CH

KROGER, FA

机构：

来源：

关键词：

D O I：

10.1149/1.2124069

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：936 / 942

页数：7

共 48 条

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