STRUCTURE AND LATERAL DIFFUSION OF OHMIC CONTACTS IN ALGAAS/GAAS HIGH ELECTRON-MOBILITY TRANSISTORS AND GAAS DEVICES

被引：12

作者：

LANGER, DW ^{[1
]}

EZIS, A ^{[1
]}

RAI, AK ^{[1
]}

机构：

[1] UNIVERSAL ENERGY SYST,DAYTON,OH 45432

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.583767

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1030 / 1032

页数：3

共 8 条

[1] REDISTRIBUTION OF ALUMINUM IN MODFET OHMIC CONTACTS
CHRISTOU, A
PAPANICOLAOU, N
[J]. SOLID-STATE ELECTRONICS, 1986, 29 (02) : 189 - 192
[2] STRUCTURAL-ANALYSIS OF AU-NI-GE AND AU-AG-GE ALLOYED OHMIC CONTACTS ON MODULATION-DOPED ALGAAS-GAAS HETEROSTRUCTURES
HIGMAN, TK
EMANUEL, MA
COLEMAN, JJ
JENG, SJ
WAYMAN, CM
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) : 677 - 680
[3] EXTREMELY LOW CONTACT RESISTANCES FOR ALGAAS/GAAS MODULATION-DOPED FIELD-EFFECT TRANSISTOR STRUCTURES
KETTERSON, A
PONSE, F
HENDERSON, T
KLEM, J
MORKOC, H
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (06) : 2305 - 2307
[4] ELECTRON-MICROSCOPE STUDIES OF AN ALLOYED AU/NI-AU-GE OHMIC CONTACT TO GAAS
KUAN, TS
BATSON, PE
JACKSON, TN
RUPPRECHT, H
WILKIE, EL
[J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) : 6952 - 6957
[5] PARASITIC SOURCE AND DRAIN RESISTANCE IN HIGH-ELECTRON-MOBILITY TRANSISTORS
LEE, SJ
CROWELL, CR
[J]. SOLID-STATE ELECTRONICS, 1985, 28 (07) : 659 - 668
[6] SCHOTTKY AND OHMIC AU CONTACTS ON GAAS - MICROSCOPIC AND ELECTRICAL INVESTIGATION
LILIENTALWEBER, Z
GRONSKY, R
WASHBURN, J
NEWMAN, N
SPICER, WE
WEBER, ER
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (04): : 912 - 918
[7] PREPARATION OF CROSS-SECTIONAL TEM SAMPLES WITH OBSERVABLE THIN-SECTIONS AT DESIRED REGIONS OF NONUNIFORM SURFACED SEMICONDUCTING DEVICES
RAI, AK
RASHID, MH
PRONKO, PP
EZIS, A
LANGER, DW
[J]. JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1987, 5 (01): : 45 - 50
[8] VERY LOW RESISTANCE AU/GE/NI/AG BASED OHMIC CONTACT FORMATION TO AL0.25/GA0.75AS/GAAS AND AL0.48IN0.52AS/GA0.47IN0.53AS HETEROSTRUCTURES - A BEHAVIORAL-COMPARISON
ZWICKNAGL, P
MUKHERJEE, SD
CAPANI, PM
LEE, H
GRIEM, HT
RATHBUN, L
BERRY, JD
JONES, WL
EASTMAN, LF
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (02): : 476 - 484

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