SIMULATION OF CIRCULAR SILICON PRESSURE SENSORS WITH A CENTER BOSS FOR VERY LOW-PRESSURE MEASUREMENT

被引:40
作者
YASUKAWA, A [1 ]
SHIMAZOE, M [1 ]
MATSUOKA, Y [1 ]
机构
[1] HITACHI LTD,NAKA WORKS,KATSUTA 312,JAPAN
关键词
D O I
10.1109/16.30935
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:1295 / 1302
页数:8
相关论文
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