BORON-HYDROGEN COMPLEXES IN CRYSTALLINE SILICON

被引:64
作者
HERRERO, CP [1 ]
STUTZMANN, M [1 ]
BREITSCHWERDT, A [1 ]
机构
[1] MAX PLANCK INST FESTKORPERFORSCH,W-7000 STUTTGART 80,GERMANY
来源
PHYSICAL REVIEW B | 1991年 / 43卷 / 02期
关键词
D O I
10.1103/PhysRevB.43.1555
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Boron-hydrogen complexes and the diffusion of hydrogen in boron-doped silicon are analyzed by means of Raman-scattering and infrared-reflection spectroscopies. At temperatures lower than 200-degrees-C, the hydrogen diffusion is controlled by a trapping at the acceptor sites, which becomes negligible at higher temperatures. Changes in the zone-center optical phonon of silicon and in the vibrational local modes of boron occur after hydrogen passivation. H and B local modes are studied as a function of temperature and external uniaxial stress. The analysis of the H-vibrational modes under stress reveals a nontrigonal symmetry of B-H complexes at 100 K, and a high mobility of hydrogen in these complexes. Our results are compared with different models proposed in the literature. We find that they are compatible with a "bond-minimum" site for hydrogen at low temperatures; however, under stress and at high temperatures, off-bond positions of H are proposed. We also analyze the stability of the boron-hydrogen complexes, and deduce a dissociation energy of 0.6 eV.
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页码:1555 / 1575
页数:21
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