ISFETS WITH ION-SENSITIVE MEMBRANES FABRICATED BY ION-IMPLANTATION

被引：28

作者：

ITO, T

INAGAKI, H

IGARASHI, I

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 01期

关键词：

D O I：

10.1109/16.2415

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：56 / 64

页数：9

共 17 条

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