ISFETS WITH ION-SENSITIVE MEMBRANES FABRICATED BY ION-IMPLANTATION

被引:28
作者
ITO, T
INAGAKI, H
IGARASHI, I
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D O I
10.1109/16.2415
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:56 / 64
页数:9
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