TEMPORAL EVOLUTION IN UV-LASER-INDUCED DEPOSITION FROM MO(CO)6

被引：8

作者：

ALEXANDRESCU, R

ANDREI, A

MORJAN, I

MULENKO, S

STOICA, M

VOICU, I

机构：

[1] INST NUCL RES,PITESTI,ROMANIA

[2] KIEV MET PHYS INST,KIEV,UKRAINE,USSR

来源：

THIN SOLID FILMS | 1992年 / 218卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90905-Q

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The temporal evolution of the composition of films obtained by laser photolysis at 248 nm was studied. As the number of laser pulses increases (800-7000 pulses at 10 Hz), the C:Mo ratio and the deposition rate decrease, while the presence of high oxidation states is revealed by X-ray photoelectron spectroscopy analysis of molybdenum and carbon chemical states. The mechanism of photodecomposition indicates more complex gas phase processes than those initiated by single-photon dissociation of the carbonyl.

引用

页码：68 / 74

页数：7

共 23 条

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