FOCUSED-ION-BEAM FUSE CUTTING FOR REDUNDANCY TECHNOLOGY

被引：5

作者：

KOMANO, H

OHMURA, Y

TAKIGAWA, T

机构：

[1] Toshiba Corp, Kawasaki, Jpn, Toshiba Corp, Kawasaki, Jpn

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 07期

关键词：

D O I：

10.1109/16.3342

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：899 / 903

页数：5

共 14 条

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[4]

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[5]

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[8]

MANO T, 1980, ISSCC, P234

[9] THE FOCUSED ION-BEAM AS AN INTEGRATED-CIRCUIT RESTRUCTURING TOOL [J].

MELNGAILIS, J ;

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[10]

MORITA S, COMMUNICATION

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