ALUMINUM-LINE CUTTING END-MONITOR UTILIZING SCANNING-ION-MICROSCOPE VOLTAGE-CONTRAST IMAGES

被引：9

作者：

ISHITANI, T

KAWANAMI, Y

TODOKORO, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1985年 / 24卷 / 02期

关键词：

D O I：

10.1143/JJAP.24.L133

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L133 / L134

页数：2

共 9 条

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