ELLIPSOMETRIC METHOD FOR THE DETERMINATION OF THE PARAMETERS OF NONABSORBING UNIAXIAL ANISOTROPIC FILMS

A numerical inversion method of ellipsometry has been developed for determining the optical constants and thicknesses of uniaxial anisotropic films in which the optical axis is perpendicular to the film surface. The method of changing film thickness has been proposed to obtain multiple independent ellipsometric equations which can separate the calculations of optical constants and of the thickness of the film, and reduces the three-parameter problem to a two-parameter problem. A flow chart of the numerical inversion program is given and an example applied to Langmuir-Blodgett films is also illustrated.