A NEW METHOD FOR ELLIPSOMETRIC INVERSION WITH MICROCOMPUTERS - CHARACTERIZATION OF OPTICALLY ABSORBING FILMS USING MULTIPLE-ANGLE-OF-INCIDENCE

被引：17

作者：

EASWARAKHANTHAN, T

MAS, P

RENARD, M

RAVELET, S

机构：

来源：

SURFACE SCIENCE | 1989年 / 216卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(89)90653-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：198 / 208

页数：11

共 16 条

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