THE EPITAXIAL-GROWTH OF ZNO THIN-FILMS ON CUBIC SUBSTRATES

被引：4

作者：

ARAKAWA, T

SHIMAOKA, G

机构：

来源：

APPLIED SURFACE SCIENCE | 1988年 / 33-4卷

关键词：

D O I：

10.1016/0169-4332(88)90345-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：501 / 508

页数：8

共 10 条

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[6] GROUP-III IMPURITY DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING [J].

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[7] STRUCTURES AND SAW PROPERTIES OF RF-SPUTTERED SINGLE-CRYSTAL FILMS OF ZNO ON SAPPHIRE [J].

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[8]

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[9]

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[10] ABRUPT TRANSITION FROM INSULATING TO HIGHLY CONDUCTING LAYERS OF ZNO BY REACTIVE MAGNETRON SPUTTERING [J].

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