ION-IMPLANTATION IN INTEGRATED-OPTICS

被引：5

作者：

GERASIMENKO, NN

TSEITLIN, GM

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1980年 / 49卷 / 1-3期

关键词：

D O I：

10.1080/00337578008243083

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：141 / 150

页数：10

共 30 条

[1]

AKIMCHENKO IP, 1973, MIKROELEKTRONIKA, V2, P166

[2] PROTON-IMPLANTED GAP OPTICAL WAVEGUIDE [J].

BARNOSKI, MK ;

HUNSPERG.RG ;

WILSON, RG ;

TANGONAN, G .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (04) :1925-1926

[3] INTRODUCTION RATES AND ANNEALING OF DEFECTS IN ION-IMPLANTED SIO2 LAYERS ON SI [J].

EERNISSE, EP ;

NORRIS, CB .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (12) :5196-5205

[4] COMPACTION OF ION-IMPLANTED FUSED SILICA [J].

EERNISSE, EP .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (01) :167-174

[5] ION IMPLANTATION AND ANNEALING EFFECTS IN SIO2 LAYERS ON SILICON STUDIED BY OPTICAL MEASUREMENTS [J].

FRITZSCHE, CR ;

ROTHEMUND, W .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (09) :1243-+

[6] OPTICAL WAVEGUIDING IN PROTON-IMPLANTED GAAS [J].

GARMIRE, E ;

STOLL, H ;

YARIV, A ;

HUNSPERGER, RG .

APPLIED PHYSICS LETTERS, 1972, 21 (03) :87-+

[7]

Garvin H L, 1973, Appl Opt, V12, P455, DOI 10.1364/AO.12.000455

[8] OPTICAL-CONSTANTS OF QUARTZ, VITREOUS SILICA AND NEUTRON-IRRADIATED VITREOUS SILICA .2. ANALYSIS OF INFRARED-SPECTRUM OF VITREOUS SILICA [J].

GASKELL, PH ;

JOHNSON, DW .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1976, 20 (02) :171-191

[9]

GERASIMENKO NN, 1977, KVANTOVAYA ELEKTRON+, V4, P1372

[10]

GERASIMENKO NN, 1977, SOV J APPL SPECTR, V26, P164

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