PROPERTIES OF SIO2 ON SI AFTER EXPOSURE TO 3-1H2+N2 AND NH3

被引：24

作者：

RUGGLES, GA

KOBA, R

TRESSLER, RE

机构：

[1] PENN STATE UNIV,DEPT MAT SCI & ENGN,UNIVERSITY PK,PA 16802

[2] PENN STATE UNIV,DEPT ELECT ENGN,UNIVERSITY PK,PA 16802

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 12期

关键词：

D O I：

10.1149/1.2108469

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2549 / 2554

页数：6

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