AUTOMATED ELECTRICAL MEASUREMENTS OF REGISTRATION ERRORS IN STEP-AND-REPEAT OPTICAL LITHOGRAPHY SYSTEMS

被引：15

作者：

HASAN, TF

KATZMAN, SU

PERLOFF, DS

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1980年 / 27卷 / 12期

关键词：

D O I：

10.1109/T-ED.1980.20270

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2304 / 2312

页数：9

共 11 条

[1]

GEGENWARTH RE, 1977, APR P SPIE SEM DEV S, P66

[2]

KISKER D, 1977, OCT P KOD MICR SEM M, P66

[3] ANALYSIS OF SUPERPOSITION ERRORS IN WAFER FABRICATION [J].

MATSUZAWA, T ;

SUNAMI, H ;

HASHIMOTO, N .

MICROELECTRONICS AND RELIABILITY, 1977, 16 (02) :173-176

[4] 4-POINT ELECTRICAL MEASUREMENT TECHNIQUE FOR CHARACTERIZING MASK SUPERPOSITION ERRORS ON SEMICONDUCTOR WAFERS [J].

PERLOFF, DS .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1978, 13 (04) :436-444

[5]

PERLOFF DS, 1980, SOLID STATE TECHNOL, V23, P81

[6] VAN-DER-PAUW RESISTOR STRUCTURE FOR DETERMINING MASK SUPERPOSITION ERRORS ON SEMICONDUCTOR SLICES [J].

PERLOFF, DS .

SOLID-STATE ELECTRONICS, 1978, 21 (08) :1013-1018

[7]

RUSSELL TJ, 1977, DEC C NOT INT EL DEV

[8] AUTOMATIC TESTING AND ANALYSIS OF MIS-REGISTRATIONS FOUND IN SEMICONDUCTOR PROCESSING [J].

STEMP, IJ ;

NICHOLAS, KH ;

BROCKMAN, HE .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (04) :729-732

[9]

STOVER H, 1980, CHARARACTERIZATION 3

[10]

WAHL FE, 1978, 8TH P INT C EL ION B

← 1 2 →