THE DECOMPOSITION OF TRIETHYLGALLIUM ON SI(100)

被引：32

作者：

LIN, R ^{[1
]}

GOW, TR ^{[1
]}

BACKMAN, AL ^{[1
]}

CADWELL, LA ^{[1
]}

LEE, F ^{[1
]}

MASEL, RI ^{[1
]}

机构：

[1] UNIV ILLINOIS,URBANA,IL 61801

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 04期

关键词：

D O I：

10.1116/1.584633

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：725 / 728

页数：4

共 21 条

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