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CHARACTERIZATION OF FAAS EPITAXIAL LAYERS BY LOW-PRESSURE MOVPE USING TEG AS GA SOURCE
被引:35
作者
:
CHANG, CY
论文数:
0
引用数:
0
h-index:
0
CHANG, CY
SU, YK
论文数:
0
引用数:
0
h-index:
0
SU, YK
LEE, MK
论文数:
0
引用数:
0
h-index:
0
LEE, MK
CHEN, LG
论文数:
0
引用数:
0
h-index:
0
CHEN, LG
HOUNG, MP
论文数:
0
引用数:
0
h-index:
0
HOUNG, MP
机构
:
来源
:
JOURNAL OF CRYSTAL GROWTH
|
1981年
/ 55卷
/ 01期
关键词
:
D O I
:
10.1016/0022-0248(81)90266-9
中图分类号
:
O7 [晶体学];
学科分类号
:
0702 ;
070205 ;
0703 ;
080501 ;
摘要
:
引用
收藏
页码:24 / 29
页数:6
相关论文
共 12 条
[1]
ETCHING OF DISLOCATIONS ON LOW-INDEX FACES OF GAAS
ABRAHAMS, MS
论文数:
0
引用数:
0
h-index:
0
ABRAHAMS, MS
BUIOCCHI, CJ
论文数:
0
引用数:
0
h-index:
0
BUIOCCHI, CJ
[J].
JOURNAL OF APPLIED PHYSICS,
1965,
36
(09)
: 2855
-
&
[2]
HETEROEPITAXIAL INAS GROWN ON GAAS FROM TRIETHYLINDIUM AND ARSINE .1. GROWTH CHARACTERIZATION
BALIGA, BJ
论文数:
0
引用数:
0
h-index:
0
机构:
RENSSELAER POLYTECH INST,ELECTROPHYS & ELECTR ENGN DIV,TROY,NY 12181
RENSSELAER POLYTECH INST,ELECTROPHYS & ELECTR ENGN DIV,TROY,NY 12181
BALIGA, BJ
GHANDHI, SK
论文数:
0
引用数:
0
h-index:
0
机构:
RENSSELAER POLYTECH INST,ELECTROPHYS & ELECTR ENGN DIV,TROY,NY 12181
RENSSELAER POLYTECH INST,ELECTROPHYS & ELECTR ENGN DIV,TROY,NY 12181
GHANDHI, SK
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1974,
121
(12)
: 1642
-
1646
[3]
DEVICE QUALITY EPITAXIAL GALLIUM-ARSENIDE GROWN BY METAL ALKYL-HYDRIDE TECHNIQUE
BASS, SJ
论文数:
0
引用数:
0
h-index:
0
机构:
SERV ELECTR RES LAB,BALDOCK SG7 6NG,HERTFORDSHIRE,ENGLAND
SERV ELECTR RES LAB,BALDOCK SG7 6NG,HERTFORDSHIRE,ENGLAND
BASS, SJ
[J].
JOURNAL OF CRYSTAL GROWTH,
1975,
31
(DEC)
: 172
-
178
[4]
ANALYSIS OF THE MAIN FACTORS INFLUENCING THE THICKNESS UNIFORMITY OF VPE GAAS THIN-LAYERS
CHANE, JP
论文数:
0
引用数:
0
h-index:
0
CHANE, JP
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1980,
127
(04)
: 913
-
917
[5]
NEW METHOD FOR THE GROWTH OF GAAS EPILAYER AT LOW H-2 PRESSURE
DUCHEMIN, JP
论文数:
0
引用数:
0
h-index:
0
DUCHEMIN, JP
BONNET, M
论文数:
0
引用数:
0
h-index:
0
BONNET, M
KOELSCH, F
论文数:
0
引用数:
0
h-index:
0
KOELSCH, F
HUYGHE, D
论文数:
0
引用数:
0
h-index:
0
HUYGHE, D
[J].
JOURNAL OF CRYSTAL GROWTH,
1978,
45
(01)
: 181
-
186
[6]
DUCHEMIN JP, 1978, J ELECTROCHEM SOC, V125, P637
[7]
PROPERTIES OF EPITAXIAL GALLIUM-ARSENIDE FROM TRIMETHYLGALLIUM AND ARSINE
ITO, S
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO, CENT RES LABS, SHIMONUMABE, KAWASAKI, JAPAN
NIPPON ELECT CO, CENT RES LABS, SHIMONUMABE, KAWASAKI, JAPAN
ITO, S
SHINOHARA, T
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO, CENT RES LABS, SHIMONUMABE, KAWASAKI, JAPAN
NIPPON ELECT CO, CENT RES LABS, SHIMONUMABE, KAWASAKI, JAPAN
SHINOHARA, T
SEKI, Y
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO, CENT RES LABS, SHIMONUMABE, KAWASAKI, JAPAN
NIPPON ELECT CO, CENT RES LABS, SHIMONUMABE, KAWASAKI, JAPAN
SEKI, Y
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1973,
120
(10)
: 1419
-
1423
[8]
SINGLE-CRYSTAL GALLIUM ARSENIDE ON INSULATING SUBSTRATES
MANASEVIT, HM
论文数:
0
引用数:
0
h-index:
0
MANASEVIT, HM
[J].
APPLIED PHYSICS LETTERS,
1968,
12
(04)
: 156
-
+
[9]
EPITAXIAL GALLIUM ARSENIDE FROM TRIMETHYL GALLIUM AND ARSINE
RAICHOUDBURY, P
论文数:
0
引用数:
0
h-index:
0
RAICHOUDBURY, P
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1969,
116
(12)
: 1745
-
+
[10]
PROPERTIES OF EPITAXIAL GAAS LAYERS FROM A TRIETHYL GALLIUM AND ARSINE SYSTEM
SEKI, Y
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO LTD, CENT RES LABS, 1753 SHIMONUMABE, KAWASAKI, JAPAN
SEKI, Y
TANNO, K
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO LTD, CENT RES LABS, 1753 SHIMONUMABE, KAWASAKI, JAPAN
TANNO, K
IIDA, K
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO LTD, CENT RES LABS, 1753 SHIMONUMABE, KAWASAKI, JAPAN
IIDA, K
ICHIKI, E
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO LTD, CENT RES LABS, 1753 SHIMONUMABE, KAWASAKI, JAPAN
ICHIKI, E
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1975,
122
(08)
: 1108
-
1112
←
1
2
→
共 12 条
[1]
ETCHING OF DISLOCATIONS ON LOW-INDEX FACES OF GAAS
ABRAHAMS, MS
论文数:
0
引用数:
0
h-index:
0
ABRAHAMS, MS
BUIOCCHI, CJ
论文数:
0
引用数:
0
h-index:
0
BUIOCCHI, CJ
[J].
JOURNAL OF APPLIED PHYSICS,
1965,
36
(09)
: 2855
-
&
[2]
HETEROEPITAXIAL INAS GROWN ON GAAS FROM TRIETHYLINDIUM AND ARSINE .1. GROWTH CHARACTERIZATION
BALIGA, BJ
论文数:
0
引用数:
0
h-index:
0
机构:
RENSSELAER POLYTECH INST,ELECTROPHYS & ELECTR ENGN DIV,TROY,NY 12181
RENSSELAER POLYTECH INST,ELECTROPHYS & ELECTR ENGN DIV,TROY,NY 12181
BALIGA, BJ
GHANDHI, SK
论文数:
0
引用数:
0
h-index:
0
机构:
RENSSELAER POLYTECH INST,ELECTROPHYS & ELECTR ENGN DIV,TROY,NY 12181
RENSSELAER POLYTECH INST,ELECTROPHYS & ELECTR ENGN DIV,TROY,NY 12181
GHANDHI, SK
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1974,
121
(12)
: 1642
-
1646
[3]
DEVICE QUALITY EPITAXIAL GALLIUM-ARSENIDE GROWN BY METAL ALKYL-HYDRIDE TECHNIQUE
BASS, SJ
论文数:
0
引用数:
0
h-index:
0
机构:
SERV ELECTR RES LAB,BALDOCK SG7 6NG,HERTFORDSHIRE,ENGLAND
SERV ELECTR RES LAB,BALDOCK SG7 6NG,HERTFORDSHIRE,ENGLAND
BASS, SJ
[J].
JOURNAL OF CRYSTAL GROWTH,
1975,
31
(DEC)
: 172
-
178
[4]
ANALYSIS OF THE MAIN FACTORS INFLUENCING THE THICKNESS UNIFORMITY OF VPE GAAS THIN-LAYERS
CHANE, JP
论文数:
0
引用数:
0
h-index:
0
CHANE, JP
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1980,
127
(04)
: 913
-
917
[5]
NEW METHOD FOR THE GROWTH OF GAAS EPILAYER AT LOW H-2 PRESSURE
DUCHEMIN, JP
论文数:
0
引用数:
0
h-index:
0
DUCHEMIN, JP
BONNET, M
论文数:
0
引用数:
0
h-index:
0
BONNET, M
KOELSCH, F
论文数:
0
引用数:
0
h-index:
0
KOELSCH, F
HUYGHE, D
论文数:
0
引用数:
0
h-index:
0
HUYGHE, D
[J].
JOURNAL OF CRYSTAL GROWTH,
1978,
45
(01)
: 181
-
186
[6]
DUCHEMIN JP, 1978, J ELECTROCHEM SOC, V125, P637
[7]
PROPERTIES OF EPITAXIAL GALLIUM-ARSENIDE FROM TRIMETHYLGALLIUM AND ARSINE
ITO, S
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO, CENT RES LABS, SHIMONUMABE, KAWASAKI, JAPAN
NIPPON ELECT CO, CENT RES LABS, SHIMONUMABE, KAWASAKI, JAPAN
ITO, S
SHINOHARA, T
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO, CENT RES LABS, SHIMONUMABE, KAWASAKI, JAPAN
NIPPON ELECT CO, CENT RES LABS, SHIMONUMABE, KAWASAKI, JAPAN
SHINOHARA, T
SEKI, Y
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO, CENT RES LABS, SHIMONUMABE, KAWASAKI, JAPAN
NIPPON ELECT CO, CENT RES LABS, SHIMONUMABE, KAWASAKI, JAPAN
SEKI, Y
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1973,
120
(10)
: 1419
-
1423
[8]
SINGLE-CRYSTAL GALLIUM ARSENIDE ON INSULATING SUBSTRATES
MANASEVIT, HM
论文数:
0
引用数:
0
h-index:
0
MANASEVIT, HM
[J].
APPLIED PHYSICS LETTERS,
1968,
12
(04)
: 156
-
+
[9]
EPITAXIAL GALLIUM ARSENIDE FROM TRIMETHYL GALLIUM AND ARSINE
RAICHOUDBURY, P
论文数:
0
引用数:
0
h-index:
0
RAICHOUDBURY, P
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1969,
116
(12)
: 1745
-
+
[10]
PROPERTIES OF EPITAXIAL GAAS LAYERS FROM A TRIETHYL GALLIUM AND ARSINE SYSTEM
SEKI, Y
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO LTD, CENT RES LABS, 1753 SHIMONUMABE, KAWASAKI, JAPAN
SEKI, Y
TANNO, K
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO LTD, CENT RES LABS, 1753 SHIMONUMABE, KAWASAKI, JAPAN
TANNO, K
IIDA, K
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO LTD, CENT RES LABS, 1753 SHIMONUMABE, KAWASAKI, JAPAN
IIDA, K
ICHIKI, E
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON ELECT CO LTD, CENT RES LABS, 1753 SHIMONUMABE, KAWASAKI, JAPAN
ICHIKI, E
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1975,
122
(08)
: 1108
-
1112
←
1
2
→