ANALYSIS OF THE MAIN FACTORS INFLUENCING THE THICKNESS UNIFORMITY OF VPE GAAS THIN-LAYERS

被引：6

作者：

CHANE, JP

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1980年 / 127卷 / 04期

关键词：

D O I：

10.1149/1.2129785

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：913 / 917

页数：5

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