FORMATION OF TI SILICIDES BY METAL-VAPOR VACUUM-ARC ION-SOURCE IMPLANTATION

Metal-vapor vacuum arc ion source was employed to synthesize Ti silicides by Ti implantation directly into Si or through a deposited titanium film on Si wafers. The implantation was conducted at room temperature at an extracted voltage of 40 kV. In the directly implanted Si wafers, the transition of Ti disilicides from a metastable C49-TiSi2 to an equilibrium phase C54-TiSi2 was observed when the current density was of 125 μA/cm2 at a nominal dose range of 3-5×1017/ cm2, while in the Si wafers with a deposited Ti film, C54-TiSi 2 was formed when the current density was of 125 μA/cm2 at a fixed nominal dose of 5×1017/cm2. The temperature rise caused by ion implantation was calculated by solving a differential thermal conduction equation and the results were employed to discuss the formation mechanism of Ti silicides. © 1995 American Institute of Physics.