ION-SCATTERING SPECTROSCOPY STUDIES OF ZIRCONIUM DIOXIDE THIN-FILMS PREPARED INSITU

被引:6
作者
MARTIN, PJ
NETTERFIELD, RP
机构
关键词
D O I
10.1002/sia.740100104
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:13 / 16
页数:4
相关论文
共 11 条
[1]   ION SCATTERING SPECTRAL FEATURES IN OXIDES CAUSED BY INELASTIC ENERGY-LOSSES [J].
BAUN, WL .
PHYSICAL REVIEW A, 1978, 17 (03) :849-853
[2]   THE CHARACTERIZATION OF POLYCRYSTALLINE MATERIALS USING ISS [J].
BAUN, WL .
APPLICATIONS OF SURFACE SCIENCE, 1982, 13 (1-2) :198-210
[3]  
Haeussler E. N., 1980, Surface and Interface Analysis, V2, P134, DOI 10.1002/sia.740020403
[4]   EFFECT OF HYDROXYLATION UPON THE ION-SCATTERING SPECTRA OF OXIDE SURFACES [J].
KELSO, JF ;
PANTANO, CG .
SURFACE AND INTERFACE ANALYSIS, 1985, 7 (05) :228-231
[5]  
MACDONALD RJ, 1981, SURF SCI, V111, pL739, DOI 10.1016/0039-6028(81)90390-3
[6]   ION-BASED METHODS FOR OPTICAL THIN-FILM DEPOSITION [J].
MARTIN, PJ .
JOURNAL OF MATERIALS SCIENCE, 1986, 21 (01) :1-25
[7]   MODIFICATION OF THE OPTICAL AND STRUCTURAL-PROPERTIES OF DIELECTRIC ZRO2 FILMS BY ION-ASSISTED DEPOSITION [J].
MARTIN, PJ ;
NETTERFIELD, RP ;
SAINTY, WG .
JOURNAL OF APPLIED PHYSICS, 1984, 55 (01) :235-241
[8]  
MCCUNE RC, 1981, J VAC SCI TECHNOL, V18, P700, DOI 10.1116/1.570930
[9]   MAGNITUDE OF THE ATOM SHIELDING EFFECT OF OXYGEN IN ION-SCATTERING SPECTROMETRY OF MAGNESIUM-SILICATE (FORSTERITE) [J].
MCCUNE, RC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05) :1569-1572
[10]   CHARACTERIZATION OF GROWING THIN-FILMS BY INSITU ELLIPSOMETRY, SPECTRAL REFLECTANCE AND TRANSMITTANCE MEASUREMENTS, AND ION-SCATTERING SPECTROSCOPY [J].
NETTERFIELD, RP ;
MARTIN, PJ ;
SAINTY, WG ;
DUFFY, RM ;
PACEY, CG .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (11) :1995-2003