COMPOSITION, MICROSTRUCTURE, AND PROPERTIES OF CRYSTALLINE MOLYBDENUM SILICIDE THIN-FILMS PRODUCED BY ANNEALING OF AMORPHOUS MO/SI MULTILAYERS

被引：21

作者：

LOOPSTRA, OB

SLOOF, WG

DEKEIJSER, TH

MITTEMEIJER, EJ

RADELAAR, S

KUIPER, AET

WOLTERS, RAM

机构：

[1] DELFT UNIV TECHNOL,CTR SUBMICRONTECHNOL,2628 CJ DELFT,NETHERLANDS

[2] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 10期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.340440

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4960 / 4969

页数：10

共 39 条

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