PROTON-IRRADIATED SILICON - COMPLETE ELECTRICAL CHARACTERIZATION OF THE INDUCED DOMINANT DEEP DEFECTS AFTER LONG-TERM ANNEALING

被引:4
作者
HUPPI, MW
机构
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1989年 / 2卷 / 1-3期
关键词
D O I
10.1016/0921-5107(89)90081-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:87 / 90
页数:4
相关论文
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