EFFECT OF HYDROCARBON-GAS ON THE PROPERTIES OF MAGNETRON SPUTTERING OF AMORPHOUS SIC-H

被引：8

作者：

SAITO, N

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1989年 / 108卷 / 02期

关键词：

D O I：

10.1016/0022-3093(89)90586-3

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：211 / 215

页数：5

共 12 条

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[7] INFLUENCE OF RF POWER ON THE PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON CARBON ALLOY-FILMS PREPARED BY MAGNETRON SPUTTERING OF SILICON IN METHANE-ARGON GAS-MIXTURES [J].

SAITO, N .

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[8] STRUCTURAL, OPTICAL AND ELECTRONIC-PROPERTIES OF AMORPHOUS SIC-H ALLOYS PREPARED BY MAGNETRON SPUTTERING OF SILICON IN METHANE-ARGON GAS-MIXTURES [J].

SAITO, N ;

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[9] HIGHLY PHOTOCONDUCTIVE AND PHOTOSENSITIVE HYDROGENATED AMORPHOUS-SILICON CARBON ALLOY-FILMS PREPARED BY MAGNETRON SPUTTERING [J].

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[10] EFFECT OF HYDROGEN ON THE PROPERTIES OF MAGNETRON SPUTTERING OF HYDROGENATED AMORPHOUS-SILICON CARBON ALLOY-FILMS [J].

SAITO, N .

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