STRUCTURAL, OPTICAL AND ELECTRONIC-PROPERTIES OF AMORPHOUS SIC-H ALLOYS PREPARED BY MAGNETRON SPUTTERING OF SILICON IN METHANE-ARGON GAS-MIXTURES

被引：46

作者：

SAITO, N ^{[1
]}

YAMADA, T ^{[1
]}

YAMAGUCHI, T ^{[1
]}

NAKAAKI, I ^{[1
]}

TANAKA, N ^{[1
]}

机构：

[1] SHIZUOKA PREFECTURAL IND TECHNOL CTR,MAKIGAYA,SHIZUOKA 42112,JAPAN

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1985年 / 52卷 / 05期

关键词：

D O I：

10.1080/01418638508241888

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：987 / 995

页数：9

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