DIRECT WRITING IN SI WITH A SCANNING TUNNELING MICROSCOPE

被引：87

作者：

VANLOENEN, EJ

DIJKKAMP, D

HOEVEN, AJ

LENSSINCK, JM

DIELEMAN, J

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 13期

关键词：

D O I：

10.1063/1.101641

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1312 / 1314

页数：3

共 21 条

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[7]

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[8]

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