REFLECTION ELECTRON-MICROSCOPE AND SCANNING TUNNELING MICROSCOPE OBSERVATIONS OF CVD DIAMOND (001) SURFACES

被引：23

作者：

SASAKI, H

AOKI, M

KAWARADA, H

机构：

[1] School of Science and Engineering, Waseda University, Shinjuku, Tokyo, 169

来源：

关键词：

D O I：

10.1016/0925-9635(93)90007-O

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Reflection electron microscopy (REM) and scanning tunneling microscopy have been applied to the estimation of the surface flatness of diamond (001) surfaces and to the 2 x 1 reconstructed structure. The macroscopic surface flatness observed by REM has been improved by using CO as a source gas and by boron-doping.

引用

页码：1271 / 1276

页数：6

共 11 条

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