ENHANCED INTER-DIFFUSION OF CU INTO RF-SPUTTERED CHROMIUM-OXIDE FILMS

被引：4

作者：

KRISHNASWAMY, SV

TONGSON, LL

SAID, N

MESSIER, R

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期

关键词：

D O I：

10.1116/1.570796

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：401 / 404

页数：4

共 12 条

[1] SELECTIVE BLACK ABSORBERS USING RF-SPUTTERED CR2O3-CR CERMET FILMS [J].

FAN, JCC ;

SPURA, SA .

APPLIED PHYSICS LETTERS, 1977, 30 (10) :511-513

[2] ANALYSIS OF GRAIN-BOUNDARY DIFFUSION IN THIN-FILMS - CHROMIUM IN GOLD [J].

HOLLOWAY, PH ;

AMOS, DE ;

NELSON, GC .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :3769-3775

[3] THERMAL-DIFFUSION OF CHROMIUM IN POLYCRYSTALLINE CDSE FILMS [J].

INGREY, SJ ;

SHEPHERD, FR ;

WESTWOOD, WD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01) :481-484

[4] MICROSTRUCTURE OF A BLACK CHROME SOLAR SELECTIVE ABSORBER [J].

LAMPERT, CM ;

WASHBURN, J .

SOLAR ENERGY MATERIALS, 1979, 1 (1-2) :81-92

[5] ISS STUDY OF THE OXIDATION OF AU ON CU (300-A) THIN-FILMS [J].

NAGASAKA, M ;

VASOFSKY, R ;

HELBIG, HF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :151-154

[6] CHEMICAL VAPOR-DEPOSITION OF THIN SEMICONDUCTOR-FILMS FOR SOLAR-ENERGY CONVERSION [J].

SERAPHIN, BO .

THIN SOLID FILMS, 1976, 39 (DEC) :87-94

[7] CHARACTERIZATION OF BLACK GE SELECTIVE ABSORBERS [J].

SWAB, P ;

KRISHNASWAMY, SV ;

MESSIER, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01) :362-365

[8] RATE-CONTROLLING STEP OF COPPER DIFFUSION-OXIDATION THROUGH GOLD [J].

TOMPKINS, HG ;

PINNEL, MR .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) :7243-7244

[9] ION SCATTERING AND AUGER-ELECTRON SPECTROMETRY OF SUPERCONDUCTING NB3GE SPUTTERED FILMS [J].

TONGSON, LL ;

ROGOWSKI, DA ;

KNOX, BE .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (11) :5059-5063

[10]

TONGSON LL, 1980, CERAM B, V59, P359

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