OPEN-TUBE DIFFUSION

被引:6
作者
CHANG, M
机构
关键词
D O I
10.1149/1.2127780
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
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页码:1987 / 1992
页数:6
相关论文
共 6 条
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[2]  
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[3]  
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[4]   DIFFUSION OF ALUMINUM IN SINGLE CRYSTAL SILICON [J].
MILLER, RC ;
SAVAGE, A .
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[5]   DIFFUSION AND INCORPORATION OF ALUMINUM IN SILICON [J].
RAICHOUDHURY, P ;
SELIM, FA ;
TAKEI, WJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (05) :762-766
[6]   ALUMINUM DIFFUSION INTO SILICON IN AN OPEN TUBE HIGH-VACUUM SYSTEM [J].
ROSNOWSKI, W .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (06) :957-962