RESONANT IONIZATION OF SPUTTERED NEUTRAL ATOMS FOR TRACE ANALYSIS IN HIGH-PURITY MATERIALS

被引：19

作者：

GELIN, P ^{[1
]}

DEBRUN, JL ^{[1
]}

GOBERT, O ^{[1
]}

INGLEBERT, RL ^{[1
]}

DUBREUIL, B ^{[1
]}

机构：

[1] UNIV ORLEANS,RECH ETUD MOLEC ION GRP,F-45017 ORLEANS,FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 40-1卷

关键词：

D O I：

10.1016/0168-583X(89)90981-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：290 / 292

页数：3

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